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High-vacuum Resistant Switches [GN]

10-5Pa
High vacuum class
compatible

Used for mask or wafer seating confirmation in vacuum deposition or sputtering systems by major semiconductor production system manufacturers and leading panel production users.
Adopts materials, adhesives and wiring supporting low out gas.

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High-vacuum Resistant Switches

Related Applications

Enables zero seek of carriers in high vacuum environment

The client is an engineer with a maker of semiconductor manufacturing equipment. He consulted us on “zero seek” of workpieces inside vacuum film forming equipment. More >

Realizes workpiece seating confirmation in a high vacuum environment

The client is an engineer with a maker of semiconductor manufacturing equipment. He consulted us on workpiece “seating confirmation” inside vacuum film forming equipment. More >

Replacement of optical fiber sensors reduced cost for workpiece positioning inside vacuum film forming equipment

The client is an engineer in the semiconductor device industry. He consulted us “positioning” of the glass substrate inside vacuum film forming equipment. More >

Reliable wafer presence detection can be realized in a vacuum

The client is an equipment manufacturer. A designer for semiconductor wafer delivery robots consulted us on wafer "presence detection". More >

Significantly reduced the cost for glass substrate alignment under vacuum environment

The client is an engineer with a semiconductor equipment manufacturer. He consulted us on glass substrate alignment in a high vacuum. More >

Resolved a false detection of the photo sensor under high-vacuum environment

A manufacturer of semiconductor manufacturing equipment that designs vacuum deposition devices to manufacture semiconductors for photovoltaic panels. A representative of substrate sensing parts design department inquired us about "positioning" of glass substrates under vacuum environment. More >

Product Lineup

  Product No. Output mode Stroke Cable direction LED
lamp
Download Price Order
Catalog CAD
GN-PT5M3A GN-PT5M3A A: NO
(Normally Open)
1.5mm Straight No LED PDF 2D / 3D 26400 JPY

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GN-PT5M3A-R GN-PT5M3A-R A: NO
(Normally Open)
1.5mm 90° No LED PDF 2D / 3D 26850 JPY

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GN-PT5M3B GN-PT5M3B B: NC
(Normally Close)
1.5mm

Straight

No LED PDF 2D / 3D 26400 JPY

Add to Cart

GN-PT5M3B-R GN-PT5M3B-R B: NC
(Normally Close)
1.5mm 90° No LED PDF 2D / 3D 26850 JPY

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Specification

Switch structure Dry contact
Repeatability
0.003mm (Range)
(At operating speed 50-200mm/min)Numerical value, being used at normal temperature
Compatible vacuum 10-5Pa
Allowable baking temperature 120℃
Pretravel A: NO = 0.3mm
B: NC = 0
Protective structure IP40
Contact force 0.5N
Contact life time 3 million
Movement differential 0
Temperature drift 0 (Because of no amplifier)
Case material SUS 304
Contact material SUS HRC45
Cable Core-wire cable
0.5m×2 PTFE, AWG 30
Oscillation 10-55Hz
total amplitude 1.5 for X, Y, Z each direction
Impact 300m/s² for X, Y, Z each direction
Contact rating DC5V-DC24V
Steady current : 10 mA or less
(Rush current: 20 mA or less)
Standard accessory Two fixing nuts
Circuit diagram Circuit diagram
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