METROL specialize in manufacturing Tool Setters & Precision Positioning Switches

Ultra precision position Swhitches  Metrol

Vacuum-Resistant Switches [GN]

10-5Pa!
High vacuum class-compatible switches

Used for mask or wafer seating confirmation in vacuum deposition or sputtering systems by major semiconductor production system manufacturers and leading panel production users.

Product list

Product No. Output mode Cable direction Worldwide Download
GN-PT5M3A A: NO Straight Buy Now
Catalog
(PDF)

Manual
(PDF)

2D CAD

3D CAD
GN-PT5M3B A: NC
GN-PT5M3A-R A: NO 90℃ (R)
GN-PT5M3B-R A: NC

Electrical specification Options / Precautions Technical guide

Specification

Switch structure Dry contact
Output mode A : NO /B:NC
Repeatability 0.003mm (range) When operating at nomal temperature
Allowable baking temperature 10-5Pa / 120℃
Pretravel 0 (Adjust the installed location of the switch by the signal switching point)
Movement differential 0
Contact life time 3 million
Stroke 1.5mm
Contact force 0.5N
Contact rating DC5V-DC24V

Applications

Vacuum chamber

Wafer seating confirmation

Vacuum thin film coating system

Positioning of the glass substrate

Vacuum equipment for PV (photovoltaic power generation)

Positioning of the glass substrate

Vacuum thin film coating system for FPD

Alignment of the glass substrate

Vacuum thin film coating system for FPD

Detection of mask seating

Vacuum thin film coating system for FPD

Carrier positioning

Technical Catalog Download

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